The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2011
Filed:
Jul. 30, 2007
Michael L. Roukes, Pasadena, CA (US);
Chung-wah Fon, Camarillo, CA (US);
Wonhee Lee, Pasadena, CA (US);
Hongxing Tang, Pasadena, CA (US);
Blake Waters Axelrod, Sierra Madre, CA (US);
John Liang Tan, San Diego, CA (US);
Michael L. Roukes, Pasadena, CA (US);
Chung-Wah Fon, Camarillo, CA (US);
Wonhee Lee, Pasadena, CA (US);
Hongxing Tang, Pasadena, CA (US);
Blake Waters Axelrod, Sierra Madre, CA (US);
John Liang Tan, San Diego, CA (US);
California Institute of Technology, Pasadena, CA (US);
Abstract
A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.