The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 21, 2011

Filed:

Jun. 29, 2005
Applicant:

Satoshi Matsui, Kanagawa, JP;

Inventor:

Satoshi Matsui, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01);
U.S. Cl.
CPC ...
Abstract

A semiconductor deviceis provided with a multiplex through plugthat fills an opening extending through the silicon substrateThe multiplex through plugscomprises a column-shaped and solid first through electrodea first insulating filmthat covers the cylindrical face of the first through electrodea second through electrodethat covers the cylindrical face of the first insulating filmand a second insulating filmthat covers the cylindrical face of the second through electrodeand these have a common central axis. The upper cross sections of the first insulating filmthe second through electrodeand the second insulating filmare annular-shaped.


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