The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2011
Filed:
Jul. 22, 2008
Paul S. Fechner, Plymouth, MN (US);
Bradley Larsen, Mound, MN (US);
Gregor Dougal, Minneapolis, MN (US);
Keith Golke, Minneapolis, MN (US);
Paul S. Fechner, Plymouth, MN (US);
Bradley Larsen, Mound, MN (US);
Gregor Dougal, Minneapolis, MN (US);
Keith Golke, Minneapolis, MN (US);
Honeywell International Inc., Morristown, NJ (US);
Abstract
A process flow for fabricating shallow trench isolation (STI) devices with direct body tie contacts is provided. The process flow follows steps similar to standard STI fabrication methods except that in one of the etching steps, body tie contacts are etched through the nitride layer and STI oxide layer, directly to the body tie. This process flow provides a direct body tie contact to mitigate floating body effects but also eliminates hysteresis and transient upset effects common in non-direct body tie contact configurations, without the critical alignment requirements and critical dimension control of the layout.