The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 21, 2011

Filed:

Mar. 03, 2008
Applicants:

Kensuke Morita, Haibara-gun, JP;

Makoto Muramatsu, Haibara-gun, JP;

Kouji Tonohara, Minami-Ashigara, JP;

Inventors:

Kensuke Morita, Haibara-gun, JP;

Makoto Muramatsu, Haibara-gun, JP;

Kouji Tonohara, Minami-Ashigara, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08F 30/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

An antireflection film forming composition, includes: a polymerized product of Compound (I) having m number of RSi(O)units, in which m stands for an integer of from 8 to 16, and Rs each independently represents a non-hydrolyzable group, with the proviso that at least two of Rs each represents a vinyl- or ethynyl-containing group, wherein each of the RSi(O)units is linked to another RSi(O)unit while having an oxygen atom in common and constitutes a cage structure, and wherein, of solids contained in the composition, the polymerized product obtained by a polymerization reaction of Compound (I) amounts to 60 mass % or greater and Compound (I) amounts to 15 mass % or less.


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