The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2011
Filed:
Dec. 23, 2003
Kay Hellig, Dresden, DE;
Ronald Grünz, Dresden, DE;
Heiko Wagner, Dresden, DE;
Uwe Liebold, Kleinroehrsdorf, DE;
Kay Hellig, Dresden, DE;
Ronald Grünz, Dresden, DE;
Heiko Wagner, Dresden, DE;
Uwe Liebold, Kleinroehrsdorf, DE;
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Abstract
The RMS database for a semiconductor process line is established on the basis of product groups or categories, wherein all members of a category are linked by a common feature, such as a common basic design or a common basic technology. Common process recipes in a specified category may then be set up only once, thereby reducing the amount of effort for establishing the database. Moreover, new product types may be readily incorporated into the categories, thereby enabling the employment of the already-established category-specific context information.