The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2011
Filed:
Apr. 04, 2008
Applicants:
Jeffrey C. Thompson, Charlestown, MA (US);
Gary B. Tepolt, Pelham, NH (US);
Livia M. Racz, Belmont, MA (US);
Inventors:
Jeffrey C. Thompson, Charlestown, MA (US);
Gary B. Tepolt, Pelham, NH (US);
Livia M. Racz, Belmont, MA (US);
Assignee:
The Charles Stark Draper Laboratory, Inc., Cambridge, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/30 (2006.01);
U.S. Cl.
CPC ...
Abstract
Microelectronic dies are thinned according to a variety of approaches, which may include bonding the dies to a substrate under vacuum, disposing a film over the dies and the substrate, and/or changing a center of pressure during thinning.