The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2011
Filed:
May. 26, 2006
Takaaki Sato, Izumi, JP;
Takaaki Sato, Izumi, JP;
Panasonic Corporation, Osaka, JP;
Abstract
The wet-processing apparatus includes a wet-step bath in which a wet-step is carried out, and a vibration-type film separator for separating impurities out of a solution used in the wet-step. The wet-processing apparatus further includes a re-supply path through which the solution out of which the impurities were removed by means of the vibration-type film separator is re-supplied to the wet-step bath. Thus, it is possible to reuse a solution and a material of which a pattern is composed. Since the vibration-type film separator is used, it is possible to reduce a frequency of exchanging filters equipped in the vibration-type film separator, and ensure a high rate at which a material of which a pattern is composed is recovered, regardless of a specific gravity of the material.