The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2011
Filed:
Sep. 11, 2007
Kazuyuki Haneda, Ichihara, JP;
Kunizo Watanabe, Minamitsuru-gun, JP;
Yosuke Sato, Minamitsuru-gun, JP;
Kazuyuki Haneda, Ichihara, JP;
Kunizo Watanabe, Minamitsuru-gun, JP;
Yosuke Sato, Minamitsuru-gun, JP;
Showa Denko K.K., Tokyo, JP;
Citizen Seimitsu Co., Ltd., Yamanashi, JP;
Abstract
The disk-shaped substrate inner circumference polishing method for polishing an inner circumference of a disk-shaped substrate including a portion having an opening hole at the center thereof includes inserting a brush having a shaft core into the portion having the opening hole of the disk-shaped substrate; fixing one end and the other end of the brush to a pair of rotating shafts that are provided at mutually detached positions and pulling at least any one of the one end and the other end of the brush and applying tension in the axial direction to the shaft core of the brush; and rotating the brush and polishing the inner circumference of the disk-shaped substrate.