The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 07, 2011

Filed:

Dec. 20, 2007
Applicants:

Hak-joo Lee, Daejeon, KR;

Seung Min Hyun, Daejeon, KR;

Jae Hyun Kim, Daejeon, KR;

Jung Yup Kim, Daejeon, KR;

Seung Woo Han, Daejeon, KR;

Jung Min Park, Daejeon, KR;

Byung Ik Choi, Daejeon, KR;

Inventors:

Hak-Joo Lee, Daejeon, KR;

Seung Min Hyun, Daejeon, KR;

Jae Hyun Kim, Daejeon, KR;

Jung Yup Kim, Daejeon, KR;

Seung Woo Han, Daejeon, KR;

Jung Min Park, Daejeon, KR;

Byung Ik Choi, Daejeon, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 60/38 (2010.01); G01Q 60/40 (2010.01); G01Q 10/00 (2010.01); G01Q 20/00 (2010.01); G01Q 80/00 (2010.01); G01N 3/42 (2006.01);
U.S. Cl.
CPC ...
Abstract

Disclosed is an atomic force microscope (AFM) probe for use in an AFM, and more particularly, an AFM probe suitable for testing the topography and mechanical properties of a microstructure having a size on the order of micrometers or nanometers. To this end, an AFM probe according to the present invention comprises an elastically deformable frame having a fixed end and a movable end on one axis; an AFM tip supported by the movable end to be movable against a test sample in a direction of the axis; and a stopper provided on an inner surface of the frame to control a movement of the AFM tip within a predetermined range.


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