The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2011
Filed:
Jun. 20, 2008
Yumiko Ohsaki, Utsunomiya, JP;
Yumiko Ohsaki, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A measurement apparatus includes a polarization controller which controls polarization of light, a wavefront dividing unit which divides a wavefront of the light, a polarizing unit which polarizes the light, a detector which detects the light, a first driving unit which moves the wavefront dividing unit with respect to the detector, a second driving unit which moves the polarizing unit with respect to the detector, and a processor which calculates the optical characteristics of the detection target using a detection results obtained when the wavefront dividing unit is positioned in the optical path and a detection result obtained when the wavefront dividing unit is positioned outside the optical path.