The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2011
Filed:
May. 01, 2008
Applicants:
Kazuo Kuroda, Kamakura, JP;
Nobuhiro Ito, Yamato, JP;
Inventors:
Kazuo Kuroda, Kamakura, JP;
Nobuhiro Ito, Yamato, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 9/00 (2006.01); H01J 9/24 (2006.01); B32B 5/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A carbon film is coated over the surface of a spacer. The carbon film has the following three features when the binding state of carbon is analyzed by X-ray photoelectron spectroscopy: (a) an integral area of a region of 284.5 eV or below is 27% or less of an integral area attributed to carbon, (b) an integral area of a region of 286.0 eV-287.0 eV is 18% or less thereof, and (c) an integral area of a region of 287.0 eV or above is 9% or more thereof.