The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2011
Filed:
Sep. 04, 2008
Mehrnaz Motiee, Fremont, CA (US);
Roger T. Howe, Los Gatos, CA (US);
Emmanuel P. Quevy, El Cerrito, CA (US);
David H. Bernstein, San Francisco, CA (US);
Mehrnaz Motiee, Fremont, CA (US);
Roger T. Howe, Los Gatos, CA (US);
Emmanuel P. Quevy, El Cerrito, CA (US);
David H. Bernstein, San Francisco, CA (US);
Silicon Laboratories, Austin, TX (US);
Abstract
A MEMS structure having a temperature-compensated resonator member is described. The MEMS structure comprises an asymmetric stress inverter member coupled with a substrate. A resonator member is housed in the asymmetric stress inverter member and is suspended above the substrate. The asymmetric stress inverter member is used to alter the thermal coefficient of frequency of the resonator member by inducing a stress on the resonator member in response to a change in temperature.