The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2011
Filed:
Oct. 05, 2009
Applicants:
Taek-jung Kim, Hwasung-si, KR;
Hee-sook Park, Hwaseong-si, KR;
Jong-min Back, Hwaseong-si, KR;
Su-kyoung Kim, Suwon-si, KR;
Yu-gyun Shin, Hwaseong-si, KR;
Sun-ghil Lee, Yongin-si, KR;
Inventors:
Taek-jung Kim, Hwasung-si, KR;
Hee-sook Park, Hwaseong-si, KR;
Jong-min Back, Hwaseong-si, KR;
Su-kyoung Kim, Suwon-si, KR;
Yu-gyun Shin, Hwaseong-si, KR;
Sun-ghil Lee, Yongin-si, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/532 (2006.01);
U.S. Cl.
CPC ...
Abstract
A sputtering target includes a tungsten (W)-nickel (Ni) alloy, wherein the nickel (Ni) is present in an amount of between about 0.01 weight % and about 1 weight %.