The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2011
Filed:
Sep. 22, 2008
Sudip Mukhopadhyay, Berkeley, CA (US);
Joseph Kennedy, San Jose, CA (US);
Yamini Pandey, Fremont, CA (US);
Jelena Sepa, Sunnyvale, CA (US);
Sudip Mukhopadhyay, Berkeley, CA (US);
Joseph Kennedy, San Jose, CA (US);
Yamini Pandey, Fremont, CA (US);
Jelena Sepa, Sunnyvale, CA (US);
Honeywell International Inc., Morristown, NJ (US);
Abstract
Bottom antireflective coating (BARC) that exhibit enhanced wet strip rates, BARC compositions for fabricating such BARCs, and methods for manufacturing such BARC compositions are provided. According to one exemplary embodiment, a bottom antireflective coating (BARC) composition comprises an inorganic-based compound, an absorbing material, and a wet strip-rate modifier combination. The wet strip-rate modifier composition comprises a combination of a short chain linear alcohol and dipropylene glycol (DPG), a combination of the short chain linear alcohol and tetraethylene glycol (TEG), a combination of DPG and TEG, or a combination of the short chain linear alcohol, DPG, and TEG.