The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 31, 2011

Filed:

Oct. 12, 2006
Applicants:

Toshio Ando, Ishikawa, JP;

Mitsuru Sakashita, Ishikawa, JP;

Takayuki Uchihashi, Ishikawa, JP;

Inventors:

Toshio Ando, Ishikawa, JP;

Mitsuru Sakashita, Ishikawa, JP;

Takayuki Uchihashi, Ishikawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 10/06 (2010.01); G01Q 60/34 (2010.01);
U.S. Cl.
CPC ...
Abstract

A scanning probe microscope is provided, which can be stably used for a long time even if excitation efficiency varies during scan. A cantilever () is excited, and the cantilever () and a sample are subjected to relative scanning. A second-harmonic component detection circuit () detects second-harmonic component amplitude of oscillation of the cantilever () as integral-multiple component amplitude. The second-harmonic component amplitude is amplitude of a second-harmonic component having a frequency twice as high as excitation frequency. An excitation intensity adjustment circuit () controls excitation intensity based on the detected second-harmonic component amplitude such that the second-harmonic component amplitude is kept constant.


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