The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7951299 B1

PDF
Full Text
Expired
Date of Patent:
May. 31, 2011

Filed:

Feb. 21, 2008
Applicants:

Mani Hossein-zadeh, Pasadena, CA (US);

Kerry J. Vahala, Pasadena, CA (US);

Inventors:

Mani Hossein-Zadeh, Pasadena, CA (US);

Kerry J. Vahala, Pasadena, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B44C 1/22 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of fabricating a microresonator is disclosed. Initially, silica is deposited on a substrate, and the substrate is etched to form a pillar, the top portion of which supports the silica. The microresonator is then formed from the silica. Next, the pillar is etched to reduce the overall diameter of the top portion of the pillar so that the microresonator can be disengaged from the pillar.


Find Patent Forward Citations

Hossein-Zadeh, Mani. (2011). Method of fabricating a microresonator (U.S. Patent No. 7951299). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7951299

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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