The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 31, 2011

Filed:

Jun. 01, 2007
Applicants:

Takayuki Nakamura, Fukuoka, JP;

Tadataka Noguchi, Fukuoka, JP;

Yoshihiro Kusama, Fukuoka, JP;

Inventors:

Takayuki Nakamura, Fukuoka, JP;

Tadataka Noguchi, Fukuoka, JP;

Yoshihiro Kusama, Fukuoka, JP;

Assignee:

Kabushiki Kaisha Yaskawa Denki, Kitakyushu-shi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
Abstract

A vacuum robot includes an arm portion on which a work is to be disposed under a reduced pressure environment and a motor portion for rotatably driving the arm portion, the vacuum robot being configured to transfer the work by causing a rotational movement of the arm portion by the motor portion. The motor portion comprises a rotor portion connected to the arm portion, a stator portion disposed at an external periphery of the rotor portion, a housing disposed under an atmospheric pressure environment, and a thin cylindrical can disposed in an electromagnetic gap formed between the rotor portion and the stator portion and secured to the housing so that the stator portion is air-tightly encapsulated in a space formed by the housing and the can. The space is maintained in a depressurized state by a seal.


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