The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2011
Filed:
Sep. 26, 2008
Yoshikazu Hishinuma, Kanagawa, JP;
Fumihiko Mochizuki, Shizuoka, JP;
Yoshikazu Hishinuma, Kanagawa, JP;
Fumihiko Mochizuki, Shizuoka, JP;
Fujifilm Corporation, Tokyo, JP;
Abstract
The piezoelectric device includes a substrate, a first electrode deposited on the substrate, a piezoelectric film deposited on top of at least a part of the first electrode by vapor phase deposition, a second electrode deposited on the piezoelectric film and having a water vapor transmission rate of not more than 1 g/m/day, and at least one protective film that covers at least peripheries of the second electrode and the piezoelectric film and which has an opening in a position corresponding to the piezoelectric film except the periphery thereof. The piezoelectric device has satisfactory moisture resistance and is capable of effectively preventing the ingress of moisture into the piezoelectric film.