The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2011
Filed:
Jan. 10, 2006
Johan Cornelis Compter, Eindhoven, NL;
Petrus Carolus Maria Frissen, Eindhoven, NL;
Jan Van Eijk, Eindhoven, NL;
Johan Cornelis Compter, Eindhoven, NL;
Petrus Carolus Maria Frissen, Eindhoven, NL;
Jan Van Eijk, Eindhoven, NL;
Koninklijke Philips Electronics N.V., Eindhoven, NL;
Abstract
Especially for use in the semiconductor industry, a displacement device () is disclosed comprising a first part comprising a carrier () on which a system of magnets () is arranged according to a pattern of row and columns extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row and each column rotates 90° counter-clockwise. The second part comprises an electric coil system () with two types of electric coils, one type having an angular offset of +45°, and the other type having an offset of −45° with respect to the X-direction. The first part () is movable over a range of centimeters or more with respect to the stationary second part (). For high precision positioning of the first part, an interferometer system () is provided.