The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2011
Filed:
Feb. 09, 2007
Ying-bing Jiang, Albuquerque, NM (US);
Joseph L. Cecchi, Albuquerque, NM (US);
C. Jeffrey Brinker, Albuquerque, NM (US);
Ying-Bing Jiang, Albuquerque, NM (US);
Joseph L. Cecchi, Albuquerque, NM (US);
C. Jeffrey Brinker, Albuquerque, NM (US);
STC.UNM, Albuquerque, NM (US);
Abstract
Barrier layers and methods for forming barrier layers on a porous layer are provided. The methods can include chemically adsorbing a plurality of first molecules on a surface of the porous layer in a chamber and forming a first layer of the first molecules on the surface of the porous layer. A plasma can then be used to react a plurality of second molecules with the first layer of first molecules to form a first layer of a barrier layer. The barrier layers can seal the pores of the porous material, function as a diffusion barrier, be conformal, and/or have a negligible impact on the overall ILD k value of the porous material.