The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2011
Filed:
Nov. 27, 2007
Applicants:
Kali Dunne, Boyle, IE;
Callian Cillian O'briain Fallon, Malahide, IE;
Inventors:
Kali Dunne, Boyle, IE;
Callian Cillian O'Briain Fallon, Malahide, IE;
Assignee:
Electro Scientific Industries, Inc., Portland, OR (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of laser machining a feature in a substrate includes machining the substrate with a pulsed laser along a scan line so that the successive pulsesat the substrate do not overlap but are either contiguous or spaced apart. Pulsesin respective succeeding scans of the laser along the scan line, are offset with respect to the starting point of pulsesin a previous scan so that multiple successive laser scans provide machining to a required depth while successively smoothing edges,of the feature with each pass.