The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2011
Filed:
Oct. 20, 2005
Norikazu Nishiyama, Osaka, JP;
Masaki Takaoka, Kyoto, JP;
Akira Kamisawa, Kyoto, JP;
Rohm Co., Ltd., Kyoto, JP;
Osaka University, Osaka, JP;
Abstract
An electroconductive porous film high in the porosity and strong in the mechanical strength is provided. A mesoporous thin film of the invention, in which a crosslinking structure having a metal phosphate (M—PO) skeleton is arranged so as to surround periodically arranged pores, is formed by use of a process that includes: a step of preparing a precursor solution containing phosphoric acid and a surfactant; a step of supplying the precursor solution to a substrate to form a precursor thin film; a step of bringing vapor containing a metal into contact with the precursor thin film obtained in the forming the thin film; a step of reacting the vapor containing a metal and phosphoric acid to form a self-organized thin film; and a step of removing the surfactant from the self-organized thin film.