The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2011
Filed:
Mar. 13, 2006
Applicant:
Nobuo Aoi, Hyogo, JP;
Inventor:
Nobuo Aoi, Hyogo, JP;
Assignee:
Panasonic Corporation, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01); H05H 1/24 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a method of forming an interlayer insulating film by plasma CVD, an organic siloxane compound including one or more silicon atoms each having at least three or more units each represented by a general formula, —O—Si(RR)—OR(wherein Rand Rare the same as or different from each other and are a methyl group, an ethyl group or a propyl group, and Ris the same as or different from Rand Rand is a methyl group, an ethyl group, a propyl group or a phenyl group) is used as a raw material.