The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2011
Filed:
Jul. 29, 2008
Takuya Hosobata, Yokosuka, JP;
Kazuya Hioki, Yokosuka, JP;
Takuya Hosobata, Yokosuka, JP;
Kazuya Hioki, Yokosuka, JP;
Sumitomo Heavy Industries, Shinagawa-Ku, Tokyo, JP;
Abstract
Stabilization of a stage in a movable stage apparatus is enhanced, and increasing in size of the movable stage apparatus is suppressed. A reaction force cancel system is provided in the movable stage apparatus where a stage moves on a surface plate installed on a floor via a vibration-isolating spring, and cancels a reaction force generated on the surface plate upon movement of the stage. The reaction force cancel system includes a reaction force canceling actuator for applying a counter-thrust that is a force for reducing the reaction force to the surface plate. The reaction force canceling actuator is arranged at a lower position than a top surface of the surface plate so that the surface plate hangs over the reaction force canceling actuator.