The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2011
Filed:
Aug. 11, 2008
Youngjin Park, Daejeon, KR;
Youn-sik Park, Daejeon, KR;
Jin-young Kim, Daejeon, KR;
Hyun JO, Daejeon, KR;
Seung Seob Lee, Daejeon, KR;
Yong Chul Kim, Daejeon, KR;
Youngjin Park, Daejeon, KR;
Youn-Sik Park, Daejeon, KR;
Jin-Young Kim, Daejeon, KR;
Hyun Jo, Daejeon, KR;
Seung Seob Lee, Daejeon, KR;
Yong Chul Kim, Daejeon, KR;
Korea Advanced Institute of Science and Technology, Yusung-Gu, Daejeon, KR;
Abstract
Disclosed herein is a multi-cantilever MEMS sensor functioning as a mechanical sensor having a plurality of cantilevers, replacing a conventional DSP based sound source localization algorithm and reducing production cost when the MEMES sensor applied to mass-produced robots, a manufacturing method thereof, a sound source localization apparatus using the multi-cantilever MEMS sensor and a sound source localization method using the sound source localization apparatus. The multi-cantilever MEMS sensor comprises a plurality of cantileverseach of which includes a piezoresistorand a sensing partfor sensing a predetermined signal generated according to the piezoresistor; and a terminal T for detecting the signal generated according to the piezoresistor, wherein one end of each cantilever is a free end and the other end thereof is a fixed end of each cantilever, the piezoresistorand the sensing partare formed at the fixed end, and the free ends of the plurality of cantilevershave different lengths. A method of manufacturing the multi-cantilever MEMS sensor is provided. Furthermore, a method of using the multi-cantilever MEMS sensor and a sound source localization apparatus are provided.