The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7943441 B1

PDF
Full Text
Expired
Date of Patent:
May. 17, 2011

Filed:

Oct. 18, 2009
Applicants:

Chan-chang Liao, Taipei County, TW;

Hsien-kun Chiu, Taoyuan County, TW;

Wei-pang Yen, Taoyuan County, TW;

Chao-huan Hsu, Taoyuan County, TW;

Kun-yuan Huang, Taipei, TW;

Inventors:

Chan-Chang Liao, Taipei County, TW;

Hsien-Kun Chiu, Taoyuan County, TW;

Wei-Pang Yen, Taoyuan County, TW;

Chao-Huan Hsu, Taoyuan County, TW;

Kun-Yuan Huang, Taipei, TW;

Assignee:

Chunghwa Picture Tubes, Ltd., Bade, Taoyuan, TW;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/84 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of forming a thin-film transistor array substrate is provided. A first mask is used to define a source, a drain and a channel on a substrate. A dielectric layer is formed to cover the source, the drain, the channel and the substrate. A second mask is used to define a patterned photoresist and the dielectric layer. A transparent conductive layer is formed to cover the patterned photoresist and the substrate. A lift-off process is performed to remove the patterned photoresist and a portion of the transparent conductive layer disposed on the patterned photoresist. A third mask is used to define a gate disposed on the dielectric layer.


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Liao, Chan-Chang. (2011). Method of forming thin film transistor array substrate (U.S. Patent No. 7943441). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7943441

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