The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2011
Filed:
Dec. 19, 2006
Hong Shih, Walnut, CA (US);
Yaobo Yin, Pleasanton, CA (US);
Jason Augustino, Fremont, CA (US);
Catherine Zhou, Oakland, CA (US);
Armen Avoyan, Oakland, CA (US);
Hong Shih, Walnut, CA (US);
Yaobo Yin, Pleasanton, CA (US);
Jason Augustino, Fremont, CA (US);
Catherine Zhou, Oakland, CA (US);
Armen Avoyan, Oakland, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method for cleaning an electrode assembly comprising a backing plate bonded to an electrode plate for a plasma processing assembly, the method including the steps of contacting the backing plate and electrode plate with a solvent; spraying the backing plate and electrode plate with water; ultrasonically cleaning the electrode assembly; enclosing the electrode assembly in a flushing fixture defined by a base plate having a plurality of liquid passages and a cover plate configured to cover the base plate, the cover plate including at least one liquid passage; and flushing the electrode assembly in the flushing fixture by introducing a flushing liquid under pressure through said at least one liquid passage in the cover plate.