The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2011
Filed:
Jun. 28, 2010
Applicants:
Chul-joo Hwang, Gyeonggi-do, KR;
Sang-do Lee, Gyeonggi-do, KR;
Inventors:
Chul-Joo Hwang, Gyeonggi-do, KR;
Sang-Do Lee, Gyeonggi-do, KR;
Assignee:
Jusung Engineering Co. Ltd., Gwangju-si, Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); C23C 16/00 (2006.01); C23F 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus includes: a process chamber for treating a substrate; a susceptor in the process chamber; a supporting frame over the susceptor; and at least one wire connected to the supporting frame.