The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2011
Filed:
Jun. 08, 2007
Yasuhiko Hashimoto, Kobe, JP;
Masao Takatori, Kobe, JP;
Yasuo Hirooka, Akashi, JP;
Kawasaki Jukogyo Kabushiki Kaisha, Kobe, JP;
Abstract
In the present invention, a baseof a robotis fixed to a fixing portionof a frame divided bodyThe baseallows force exerted from a robot main bodyA to be transmitted to the fixing portionof the frame divided bodyContrary, the fixing portionof the frame divided bodyhas rigidity which can prevent the force exerted from the baseof the robotfrom being transmitted to a main body constituting memberAccordingly, the baseof the robothas only to possess a function for connecting the robot main bodyA and the frame divided bodyTherefore, even though reducing its rigidity, transmission of vibration to the wafer processing apparatus can be prevented, as well as occurrence of malfunctioning in the substrate processing work can be prevented. In addition, increasing the rigidity of the frame divided bodycan be achieved easier with a simpler construction and more effective than increasing the rigidity of the robot. Accordingly, more secured wafer processing can be provided.