The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2011
Filed:
Aug. 07, 2003
Daihachi Shojima, Kumamoto, JP;
Daihachi Shojima, Kumamoto, JP;
NOK Corporation, Tokyo, JP;
Abstract
To make a plasma resistant seal excellent in both a plasma resisting performance and a sealing performance, and prevent an O-ring from protruding to a vacuum side gap, a plasma seal () made of PTFE having a plasma resisting performance is provided in a plasma irradiating side of an O-ring () as a main seal made of a rubber-like elastic material, an installation groove () shallower than a depth of an installation groove () provided in an installation member () is continuously provided in a plasma irradiation side of the installation groove (), the O-ring () is attached to the installation groove (), and the plasma seal () is attached to the installation groove () in a compressed state, or the O-ring is attached to the installation groove and the plasma seal is attached to the plasma irradiation side of the same installation groove () in a compressed state.