The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 10, 2011

Filed:

Feb. 25, 2010
Applicant:

Masatoshi Sato, Machida, JP;

Inventor:

Masatoshi Sato, Machida, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/25 (2006.01);
U.S. Cl.
CPC ...
Abstract

A color distribution measuring optical system generates an image of an object to be measured via an imaging optical system and a color matching function filter. The color matching function filter is an optical multilayer film filter, and the angle of arrangement of the color matching function filter can be changed, with respect to an optical axis of the imaging optical system, depending on the numerical aperture of the imaging optical system by a tilt angle changing device. Various imaging optical systems can be used even when the optical multilayer filter is used.


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