The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 10, 2011

Filed:

Jun. 27, 2009
Applicant:

Young-kyun Jung, Gyeonggi-do, KR;

Inventor:

Young-Kyun Jung, Gyeonggi-do, KR;

Assignee:

Hynix Semiconductor Inc., Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for fabricating a semiconductor device includes forming buried bit lines in a first substrate; forming a trench that separate the buried bit lines from each other; forming an interlayer insulation layer to gap-fill the trench; forming a second substrate over the first substrate gap-filled with the interlayer insulation layer; forming a protective pattern over the second substrate; forming a plurality of active pillars by etching the second substrate using the protective pattern as an etch barrier; and forming vertical gates surrounding sidewalls of the active pillars.


Find Patent Forward Citations

Jung, Young-Kyun. (2011). Method for fabricating semiconductor device with vertical gate (U.S. Patent No. 7939411). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7939411

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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