The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2011
Filed:
Sep. 27, 2007
Xianyong Pu, Shanghai, CN;
Jianhong Mao, Shanghai, CN;
Yiqun Chen, Shanghai, CN;
Jing Fu, Shanghai, CN;
Xianyong Pu, Shanghai, CN;
Jianhong Mao, Shanghai, CN;
Yiqun Chen, Shanghai, CN;
Jing Fu, Shanghai, CN;
Abstract
The present invention discloses a method of fabricating mirrors for LCOS (Liquid Crystal On Silicon) display device, including: forming a dielectric layer over a silicon substrate; forming a stop layer over the dielectric layer; forming an insulation layer over the stop layer; etching the insulation layer and the stop layer until the dielectric layer is exposed, thus forming an insulation fence; forming a metal layer over the dielectric layer and the insulation fence; and planarizing the metal layer and the insulation fence, hence the planarized insulation fence isolating the metal layer into mirror array. Therefore no pits can be generated in the metal layer and no pits can be generated in the mirrors formed subsequently, resulting in high quality mirror surface.