The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2011
Filed:
Oct. 17, 2007
Hans-juergen Heinrich, Kleinroehrsdorf, DE;
Goetz Teschner, Dresden, DE;
Thorsten Sander, Dresden, DE;
Cornell Weidelt, Dresden, DE;
Joern Brueckner, Langebrueck, DE;
Hans-Juergen Heinrich, Kleinroehrsdorf, DE;
Goetz Teschner, Dresden, DE;
Thorsten Sander, Dresden, DE;
Cornell Weidelt, Dresden, DE;
Joern Brueckner, Langebrueck, DE;
Von Ardenne Anlagentechnic GmbH, Dresden, DE;
Abstract
A supply end block to supply a sputter cathode with a coolant and electrical voltage, includes a housing with a coolant connection and a current connection as well as a support shaft mounted to rotate, on which a target tube is fastened. The coolant connection and current connection are brought together directly at a feed site so that the coolant is brought to the potential of the applied electric voltage on entering the housing of the end block. Optimal cooling of the current feed is achieved, and optimal potential equalization of the coolant simultaneously occurs.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile