The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 03, 2011

Filed:

Dec. 20, 2005
Applicants:

Dong-sil Park, Niskayuna, NY (US);

Mark Philip D'evelyn, Niskayuna, NY (US);

Myles Standish Peterson, Ii, Sloanesville, NY (US);

John Thomas Leman, Niskayuna, NY (US);

Joell Randolph Hibshman, Ii, Delanson, NY (US);

Fred Sharifi, Niskayuna, NY (US);

Inventors:

Dong-Sil Park, Niskayuna, NY (US);

Mark Philip D'Evelyn, Niskayuna, NY (US);

Myles Standish Peterson, II, Sloanesville, NY (US);

John Thomas Leman, Niskayuna, NY (US);

Joell Randolph Hibshman, II, Delanson, NY (US);

Fred Sharifi, Niskayuna, NY (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/34 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of making a metal nitride is provided. The method may include introducing a metal in a chamber. A nitrogen-containing material may be flowed into the chamber. Further, a hydrogen halide may be introduced. The nitrogen-containing material may react with the metal in the chamber to form the metal nitride.


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