The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2011
Filed:
May. 16, 2006
Saravjeet Singh, Santa Clara, CA (US);
Manoocher Birang, Los Gatos, CA (US);
Nicolay Y. Kovarsky, Sunnyvale, CA (US);
Aron Rosenfeld, Palo Alto, CA (US);
Saravjeet Singh, Santa Clara, CA (US);
Manoocher Birang, Los Gatos, CA (US);
Nicolay Y. Kovarsky, Sunnyvale, CA (US);
Aron Rosenfeld, Palo Alto, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The present invention generally relates to apparatus and methods for plating conductive materials on a substrate. One embodiment of the present invention provides an apparatus for plating a conductive material on a substrate. The apparatus comprises a fluid basin configured to retain an electrolyte, a contact ring configured to support the substrate and contact the substrate electrically, and an anode assembly disposed in the fluid basin, wherein the anode assembly comprises a plurality of anode elements arranged in rows.