The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2011
Filed:
Jul. 16, 2007
Randy A. Harris, Kalispell, MT (US);
Steve L. Eudy, Kalispell, MT (US);
Paul Z. Wirth, Whitefish, MT (US);
Randy A. Harris, Kalispell, MT (US);
Steve L. Eudy, Kalispell, MT (US);
Paul Z. Wirth, Whitefish, MT (US);
Semitool, Inc., Kalispell, MT (US);
Abstract
A wafer processing system has a wafer loading system accommodating sufficient wafer carriers to substantially maximize the processing speed capability of the processing system. Wafer carriers are placed into and removed from the loading system by one or two overhead carrier loading tracks. Carriers may be loaded or removed while other carriers are in work. One or more transfer robots may move wafers from the carriers to buffers. One or more process robots in a process module move wafers from buffers, or other locations, to processors in the process module.