The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2011
Filed:
Dec. 10, 2007
Steven S. Nasiri, Saratoga, CA (US);
Goksen G. Yaralioglu, Mountain View, CA (US);
Joseph Seeger, Menlo Park, CA (US);
Babak Taheri, San Francisco, CA (US);
Steven S. Nasiri, Saratoga, CA (US);
Goksen G. Yaralioglu, Mountain View, CA (US);
Joseph Seeger, Menlo Park, CA (US);
Babak Taheri, San Francisco, CA (US);
Invensense, Inc., Sunnyvale, CA (US);
Abstract
Sensors for measuring angular acceleration about three mutually orthogonal axes, X, Y, Z or about the combination of these axes are disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to rotate substantially about the X, and/or Y, and/or Z, by at least one linkage and is responsive to angular accelerations about the X, and/or Y, and/or Z directions. Finally, the sensor includes at least one electrode at the base plate or perpendicular to the base plate and at least one transducer for each sensing direction of the sensor subassembly responsive to the angular acceleration. Multi-axis detection is enabled by adjusting a configuration of flexures and electrodes.