The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 26, 2011

Filed:

Apr. 24, 2006
Applicants:

Harald Schenk, Dresden, DE;

Alexander Wolter, Dresden, DE;

Thilo Sandner, Dresden, DE;

Christian Drabe, Dresden, DE;

Thomas Klose, Dresden, DE;

Inventors:

Harald Schenk, Dresden, DE;

Alexander Wolter, Dresden, DE;

Thilo Sandner, Dresden, DE;

Christian Drabe, Dresden, DE;

Thomas Klose, Dresden, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H03B 5/18 (2006.01); H01L 27/14 (2006.01);
U.S. Cl.
CPC ...
Abstract

The invention relates to micromechanical elements deflectable in an oscillating manner and to a method for the operation of such elements. In this respect, it is the object of the invention to be able to operate the micromechanical elements in a stable and simple manner on the oscillating deflection while taking account of the respective mechanical resonant frequency. A least one spring element is present on elements in accordance with the invention with which it is held. It is deflected between two reversal points using an electrical AC voltage. The one or more spring element(s) has/have non-linear spring characteristics so that a changed mechanical resonant frequency results in dependence on the respective deflection.


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