The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2011
Filed:
Mar. 12, 2007
Yasuhiro Joho, Toyama, JP;
Yasuhiro Joho, Toyama, JP;
Hitachi Kokusai Electric Inc., Tokyo, JP;
Abstract
A centralized control apparatus includes a data collecting part that gathers data at a predetermined interval from a substrate processing apparatus for each component in the substrate processing apparatus; a data processing part that determines a status of each component based on the gathered data and regulation control information including attribute information about each component, maintenance information and previously established status-determined information about each component, at a predetermined timing established for each component, and performs thinning-out-processing to the gathered data on a determination result and prepares processed data by processing data obtained by the thinning-out-processing; and a data transmitting part that sends the regulation control information including the determination result and the processed data to a terminal unit.