The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2011
Filed:
Sep. 04, 2008
David Michael Rusinko, Jr., Parma Heights, OH (US);
Marc Schaepkens, Clifton Park, NY (US);
Wanxue Zeng, Guilderland Center, NY (US);
David Michael Rusinko, Jr., Parma Heights, OH (US);
Marc Schaepkens, Clifton Park, NY (US);
Wanxue Zeng, Guilderland Center, NY (US);
Momentive Performance Materials Inc., Albany, NY (US);
Abstract
An article with an etch resistant coating is disclosed. The article is a heating element, wafer carrier, or electrostatic chuck. The article has a base substrate made of a ceramic or other material, and further has one or more electrodes for resistance heating or electromagnetic chucking or both. The eth resistant coating has a plurality of regions made from materials having different electrical volume resistivities, such that the overall coating has a bulk resistivity that can be tailored by varying the relative size of each region.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile