The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2011
Filed:
Apr. 30, 2009
Akinori Ohkubo, Tucson, AZ (US);
Akinori Ohkubo, Tucson, AZ (US);
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A measurement apparatus which illuminates a pattern positioned on an object plane to form an aerial imageon an image plane and measures a light intensity distribution of the aerial imagevia a sliton the image plane, the measurement apparatus including a stagemoving the slit, a light receiving elementmounted on the stageand including at least two light receiving portions which receive the light transmitted through the slit, a storage unit which stores a relationship between an angle ε and a distance between a center position of the slitand a position where a intensity of light that the light receiving elementreceives is maximum, a calculation unit which obtains the angle ε, and a stage driving unitwhich rotates the stageso that the angle ε is equal to zero.