The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2011
Filed:
Feb. 11, 2009
Applicants:
Jeffrey Scott Cites, Horseheads, NY (US);
Kishor Purushottam Gadkaree, Big Flats, NY (US);
Richard Orr Maschmeyer, Corning, NY (US);
Inventors:
Jeffrey Scott Cites, Horseheads, NY (US);
Kishor Purushottam Gadkaree, Big Flats, NY (US);
Richard Orr Maschmeyer, Corning, NY (US);
Assignee:
Corning Incorporated, Corning, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/30 (2006.01); H01L 21/46 (2006.01); H01L 21/762 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed are methods for making SOI and SOG structures using purified ion shower for implanting ions to the donor substrate. The purified ion shower provides expedient, efficient, low-cost and effective ion implantation while minimizing damage to the exfoliation film.