The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2011
Filed:
Dec. 03, 2008
Applicants:
Hi-kuk Lee, Yongin-si, KR;
Sang-hyun Yun, Suwon-si, KR;
Min-soo Lee, Hwaseong-si, KR;
Deok-man Kang, Seongnam-si, KR;
Sae-tae OH, Pyeongtaek-si, KR;
Jae-young Choi, Suwon-si, KR;
Inventors:
Hi-Kuk Lee, Yongin-si, KR;
Sang-Hyun Yun, Suwon-si, KR;
Min-Soo Lee, Hwaseong-si, KR;
Deok-Man Kang, Seongnam-si, KR;
Sae-Tae Oh, Pyeongtaek-si, KR;
Jae-Young Choi, Suwon-si, KR;
Assignees:
Samsung Electronics Co., Ltd., Suwon-si, KR;
AZ Electronic Materials (Japan) K.K., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A photoresist composition includes a binder resin, a photo acid generator, an acryl resin having four different types of monomers, and a solvent.