The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2011
Filed:
Feb. 01, 2007
Job Vianen, Nijmegen, NL;
Jozef P. W. Stokkermans, Nijmegen, NL;
Job Vianen, Nijmegen, NL;
Jozef P. W. Stokkermans, Nijmegen, NL;
NXP B.V., Eindhoven, NL;
Abstract
The present invention relates to an apparatus () for aligning an optical device with an object. The apparatus comprises, a frame (), a support unit () for supporting said optical device or said object and a transportation device () arranged to at least tilt the support unit in relation to the frame, wherein a segment of a sphere () is provided, which segment defines a spherical surface (), and the tilting movement of the support unit is controlled by said spherical surface. The apparatus according to the invention allows for a tilting movement between said optical device and said object, while such movement does not lead to a shift in focus. Furthermore the invention relates to an optical instrument and a semiconductor process system comprising said apparatus.