The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 19, 2011

Filed:

Mar. 16, 2007
Applicant:

Yukio Taniguchi, Yokohama, JP;

Inventor:

Yukio Taniguchi, Yokohama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 1/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

A light irradiation apparatus irradiates a target plane with light having a predetermined light intensity distribution. The apparatus includes a light modulation element having a light modulation pattern of a periodic structure represented by a primitive translation vector (a, a), an illumination system for illuminating the modulation element with the light, and an image forming optical system for forming the predetermined light intensity distribution obtained by the modulation pattern on the target plane. A shape of an exit pupil of the illumination system is similar to the Wigner-Seitz cell of a primitive reciprocal lattice vector (b, b) obtained from the primitive translation vector (a, a) by the following equations:1=2π(2×3)/(1·(2×3)) and2=2π(3×1)/(1·(2×3))in which ais a vector having an arbitrary size in a normal direction of a flat surface of the modulation pattern of the modulation element, '·' is an inner product of the vector, and '×' is an outer product of the vector.


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