The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2011
Filed:
Mar. 19, 2007
Yasuhiro Fukumoto, Kyoto, JP;
Masao Tsuji, Kyoto, JP;
Hiroshi Miyauchi, Kyoto, JP;
Hideyuki Taniguchi, Kyoto, JP;
Yasuhiro Fukumoto, Kyoto, JP;
Masao Tsuji, Kyoto, JP;
Hiroshi Miyauchi, Kyoto, JP;
Hideyuki Taniguchi, Kyoto, JP;
Abstract
A heat treatment apparatus includes a support sheet placed on an upper surface of a heat-treating plate. The support sheet has, formed on an upper surface thereof, projections for contacting and supporting a substrate, and a lip for contacting edge regions of the substrate. The support sheet is formed by an etching process, and therefore areas of the sheet around the projections are recessed, rather than being perforated as in the case of laser processing. These heat-treating plate and support sheet constitute a substrate support structure capable of supporting the substrate properly.