The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 19, 2011

Filed:

May. 26, 2003
Applicants:

Stephan Behle, Hanheim, DE;

Andreas Luttringhaus-henkel, Darmstadt, DE;

Gregor Arnold, Bodenheim, DE;

Mathias Bicker, Mainz, DE;

Marten Walther, Alfeld, DE;

Juergen Klein, Mainz, DE;

Inventors:

Stephan Behle, Hanheim, DE;

Andreas Luttringhaus-Henkel, Darmstadt, DE;

Gregor Arnold, Bodenheim, DE;

Mathias Bicker, Mainz, DE;

Marten Walther, Alfeld, DE;

Juergen Klein, Mainz, DE;

Assignee:

Schott AG, Mainz, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/511 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01); C23C 16/06 (2006.01); C23C 16/22 (2006.01);
U.S. Cl.
CPC ...
Abstract

A coating apparatus is provided for simplifying the introduction and removal of workpieces into and from a reactor for plasma coating and to increase the throughput. The coating apparatus has a reactor with a moveable sleeve part and a base element, at least one sealed coating chamber being defined between sleeve part and base element when the latter two parts are fitted onto one another. The coating apparatus also has a device for introducing electromagnetic energy into the at least one coating chamber. The reactor has at least two coating places.


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