The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2011
Filed:
Sep. 23, 2009
Steven R. Collins, Lexington, MA (US);
Abron S. Toure, Portland, OR (US);
Steven D. Bernstein, Brighton, MA (US);
Steven R. Collins, Lexington, MA (US);
Abron S. Toure, Portland, OR (US);
Steven D. Bernstein, Brighton, MA (US);
The United States of America as represented by the Secretary of the Navy, Washington, DC (US);
Abstract
A structure including a TiW oxygen plasma mask, a photoresist mask above and in contact with the TiW oxygen plasma mask, a 2000 angstrom thick oxygen plasma vaporizable RuOelectrode layer partially under and in contact with the TiW oxygen plasma mask, the RuOelectrode layer not being completely covered by a pattern of the TiW oxygen plasma mask, a first side of a PZT ferroelectric layer in contact with the RuOelectrode layer and a second RuOelectrode layer in contact with a second side of the PZT ferroelectric layer.