The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 12, 2011

Filed:

Oct. 26, 2006
Applicants:

Takamichi Fujii, Kanagawa-ken, JP;

Hiroyuki Usami, Ebina, JP;

Inventors:

Takamichi Fujii, Kanagawa-ken, JP;

Hiroyuki Usami, Ebina, JP;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

An inorganic film base plate is produced with a process comprising the steps of: preparing a surface recess-protrusion base plate, which is provided with a recess-protrusion pattern on a surface, and forming an inorganic film along a surface shape of the surface recess-protrusion base plate, the inorganic film containing a plurality of pillar-shaped structure bodies, each of which extends in a direction nonparallel with the base plate surface of the surface recess-protrusion base plate. Force of physical action may then be exerted upon the thus formed inorganic film in order to separate an on-protrusion film region of the inorganic film and an adjacent on-recess film region of the inorganic film from each other.


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